Semiconductor Equipment Racks

Semiconductor Equipment Racks

ALD Rack

ALD (Atomic Layer Deposition) Racks

Semiconductor ALD equipment racks and precision parts manufacturing

PEALD Rack

PEALD Racks

Semiconductor plasma-enhanced ALD equipment racks and parts

PVD Rack

PVD Racks

Semiconductor PVD equipment racks and precision parts

MCVD Rack

MCVD Racks

Semiconductor MCVD equipment racks and precision parts

MOCVD Rack

MOCVD Racks

Semiconductor MOCVD epi equipment racks and parts

Diffusion Furnace Rack

Diffusion Furnace (Annealing) Racks

Semiconductor diffusion furnace equipment racks and parts

EPI Rack

EPI Racks

Semiconductor EPI deposition equipment racks and parts

Ion Implanter Rack

Ion Implanter Racks

Semiconductor ion implanter racks and key parts

Lithography Rack

Lithography Equipment Racks

Semiconductor lithography equipment racks and parts

Etcher Rack

Etching Equipment Racks

Semiconductor etching equipment racks and key parts

Deposition Rack

Deposition Equipment Racks

Semiconductor deposition equipment racks and key parts

Cleaning Rack

Cleaning Equipment Racks

Semiconductor cleaning equipment racks and key parts

Metrology Equipment

Metrology Equipment

Semiconductor metrology equipment racks and key parts

Equipment Refurbishment

Equipment Rack Refurbishment

Semiconductor used equipment rack refurbishment services

Rack & Enclosure

Semiconductor Racks / Equipment Enclosures

Custom semiconductor equipment racks and enclosures, precision sheet metal, custom fabrication

Gas Cabinet & Gas Distribution

Semiconductor Gas Cabinets

VMB Gas Cabinet

VMB Gas Cabinet

Safe delivery and control of semiconductor process gases

GC Gas Cabinet

GC Gas Cabinet

Specialty gas cabinet for safe storage and delivery of toxic/hazardous gases

Double Bottle Cabinet

Double Bottle Cabinet

Double bottle set cabinet with automatic gas switching

Cylinder Rack

Cylinder Rack

Gas cylinder storage rack for safe high-pressure cylinder storage

Gas Panel

Gas Distribution Panel

Custom semiconductor gas distribution panel manufacturing

Precision Sheet Metal

Precision Sheet Metal Processing

Stainless Steel

Stainless Steel

SUS304 / SUS316L / SUS316Ti, corrosion-resistant, high-strength

Carbon Steel

Carbon Steel

Q235B / SPCC / SGCC, equipment bases, heavy-duty frames

Titanium Alloy

Titanium Alloy

TC4 / Gr2 / Gr5, lightweight, high-strength, corrosion-resistant

Aluminum Alloy

Aluminum Alloy

6061-T6 / 5052-H32 / 7075-T6, lightweight, thermal conductivity

Hastelloy

Hastelloy

Haynes 276 / C-276 / C-22, extreme corrosion resistance

CNC Precision Machining

CNC Machining

CNC Stainless Steel

Stainless Steel

SUS304 / SUS316L, corrosion-resistant, high-strength

CNC Engineering Plastics

Engineering Plastics

PEEK / PI / PTFE, high-temperature insulation

CNC Aluminum

Aluminum Alloy

6061-T6 / 7075-T6, lightweight, easy to machine

CNC Titanium

Titanium Alloy

TC4 / Gr5, lightweight, high-strength

CNC Carbon Steel

Carbon Steel

Q235 / 45#, structural components

Surface Treatment

Surface Treatment

Powder Coating

Powder Coating

Electrostatic powder adsorption with high-temp curing, strong adhesion, eco-friendly and durable

Paint Spraying

Liquid Paint Spraying

High-pressure spraying, uniform coverage, rich color options

Anodizing

Anodizing

Electrolytic oxidation treatment, improved corrosion resistance, color options available

Sandblasting

Sandblasting

Abrasive surface cleaning, oxide removal, improved coating adhesion

Silk Printing

Silk Screen Printing

Screen printing for nameplates and labels, wear-resistant and weatherproof

Material Selection

Material Selection Guide

Material Grade Density Tensile Strength Typical Applications
Stainless Steel SUS304 / SUS316L / SUS316Ti 7.9 g/cm³ ≥515 MPa Vacuum chamber lids, wet process stands, EMI shielding enclosures
Aluminum Alloy 6061-T6 / 5052-H32 / 7075-T6 2.7 g/cm³ ≥275 MPa Robot arm components, heat sinks, non-load-bearing panels
Titanium Alloy TC4 / Gr2 / Gr5 4.5 g/cm³ ≥900 MPa Equipment frames, EUV lithography frames, corrosive gas piping
Carbon Steel Q235B / SPCC / SGCC 7.85 g/cm³ ≥375 MPa Equipment bases, heavy-duty frames, panels, electrical enclosures
Oxygen-Free Copper C101 / C110 / TU1 8.9 g/cm³ ≥220 MPa High-frequency electrical connections, vapor chambers, heat sinks, gold-plated substrates
Brass H62 / H65 / HPb59-1 8.5 g/cm³ ≥400 MPa Small threaded connectors, valve bodies, fittings, decorative parts
Kovar Alloy Kovar / 4J29 / 4J36 8.3 g/cm³ ≥450 MPa Vacuum seal encapsulation, glass-to-metal seals, TK components
Invar Alloy Invar 36 / 4J36 8.1 g/cm³ ≥490 MPa Precision optomechanical structures, measurement reference parts, thermally stable components
Hastelloy Haynes 276 / C-276 / C-22 8.9 g/cm³ ≥690 MPa Corrosive gas environments, chloride media, high-temp corrosion-resistant structures
Nylon PA66-GF30 / MC Nylon 1.35 g/cm³ ≥80 MPa Insulating structural parts, wear-resistant bushings, jigs, brackets
PTFE / PEEK PTFE / PEEK / PVDF 1.3~2.2 g/cm³ ≥40 MPa Seals, corrosion-resistant linings, high-temp insulation, high-purity gas piping
POM POM-C / POM-H (DuPont) 1.41 g/cm³ ≥65 MPa Insulating washers, guide rail slides, motion gears, non-metal bearings